Semiconductor vacuum process tools are our specialty. We design automated equipment to your specifications, as well as refurbish and automate older equipment.
jvk Services
Repair PECVD, RIE, Plasma Etcher
2024-06-30
Repair semiconductor and plasma process systems: PECVD, RIE and Plasma Etcher; automation upgrades include AE PC5000 drop-in replacement vacuum system controller for PlasmaTherm 70 Series and other brands.